Developments in Semiconductor Microlithography IV
Two, 6 inch aperture, Interferometers for Measuring Photoplate Flatness optical design of the Tropel 9900 Flatness Analyzer is an ... \p FILTER BEAM SPLITTER - SAPPHIRE REFERENCE PIN aquot; n COLLIMATOR -* OBJECTIVE 1 REFERENCE SURFACE PHOTOPLATE cctv a agt;r CAMERA Fig . Optical Diagram Light is collected by a condenser lens which has an internal, blocked interference filter.
| Title | : | Developments in Semiconductor Microlithography IV |
| Author | : | |
| Publisher | : | - 1979 |
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